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Silicon Photonics Co-integrated with Silicon Nitride for Optical Phased Arrays

dc.contributor.authorMarinins, Aleksandrs
dc.contributor.authorDwivedi, Sarvagya Paavan
dc.contributor.authorKjellman, Jon
dc.contributor.authorKerman, Sarp
dc.contributor.authorDavi, Tangla
dc.contributor.authorFigeys, Bruno
dc.contributor.authorJansen, Roelof
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorSoussan, Philippe
dc.date.accessioned2021-10-27T13:32:03Z
dc.date.available2021-10-27T13:32:03Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33538
dc.sourceIIOimport
dc.titleSilicon Photonics Co-integrated with Silicon Nitride for Optical Phased Arrays
dc.typeProceedings paper
dc.contributor.imecauthorMarinins, Aleksandrs
dc.contributor.imecauthorDwivedi, Sarvagya Paavan
dc.contributor.imecauthorKjellman, Jon
dc.contributor.imecauthorFigeys, Bruno
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.orcidimecDwivedi, Sarvagya Paavan::0000-0003-1184-3225
dc.contributor.orcidimecFigeys, Bruno::0000-0002-0108-3907
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage83
dc.source.endpage84
dc.source.conferenceExtended Abstracts of the 2019 International Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate2/09/2019
dc.source.conferencelocationNagoya Japan
imec.availabilityPublished - open access


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