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BioFET technology: aggressively scaled pMOS FinFET as biosensor

dc.contributor.authorMartens, Koen
dc.contributor.authorSantermans, Sybren
dc.contributor.authorGupta, Mihir
dc.contributor.authorHellings, Geert
dc.contributor.authorWuytens, Robin
dc.contributor.authorDu Bois, Bert
dc.contributor.authorDupuy, Emmanuel
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorJans, Karolien
dc.contributor.authorVos, Rita
dc.contributor.authorStakenborg, Tim
dc.contributor.authorLagae, Liesbet
dc.contributor.authorHeyns, Marc
dc.contributor.authorSeveri, Simone
dc.contributor.authorVan Roy, Wim
dc.date.accessioned2021-10-27T13:40:19Z
dc.date.available2021-10-27T13:40:19Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33553
dc.sourceIIOimport
dc.titleBioFET technology: aggressively scaled pMOS FinFET as biosensor
dc.typeProceedings paper
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorSantermans, Sybren
dc.contributor.imecauthorGupta, Mihir
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.imecauthorDupuy, Emmanuel
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorJans, Karolien
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorStakenborg, Tim
dc.contributor.imecauthorLagae, Liesbet
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorVan Roy, Wim
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecSantermans, Sybren::0000-0002-0843-102X
dc.contributor.orcidimecGupta, Mihir::0000-0003-0286-7997
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.contributor.orcidimecDupuy, Emmanuel::0000-0003-3341-1618
dc.contributor.orcidimecStakenborg, Tim::0000-0001-9878-9078
dc.contributor.orcidimecVan Roy, Wim::0000-0003-3232-1987
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage438
dc.source.endpage441
dc.source.conferenceIEEE International Electron Devices Meeting - IEDM
dc.source.conferencedate7/12/2019
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access


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