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dc.contributor.authorMeersschaut, Johan
dc.contributor.authorLaricchiuta, Grazia
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-27T13:46:34Z
dc.date.available2021-10-27T13:46:34Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33564
dc.sourceIIOimport
dc.titleHigh performance Rutherford bakscattering spectrometry using multidetector digital pulse processing
dc.typeProceedings paper
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.source.peerreviewyes
dc.source.conference24th International Conference on Ion Beam Analysis (IBA2019)
dc.source.conferencedate13/10/2019
dc.source.conferencelocationAntibes France
imec.availabilityPublished - imec


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