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Quantitative modelling of deposition of airborne molecular contamination

dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-27T13:54:10Z
dc.date.available2021-10-27T13:54:10Z
dc.date.issued2019-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33578
dc.sourceIIOimport
dc.titleQuantitative modelling of deposition of airborne molecular contamination
dc.typeProceedings paper
dc.contributor.imecauthorMertens, Paul
dc.date.embargo9999-12-31
dc.identifier.doi10.1149/09202.0237ecst
dc.source.peerreviewyes
dc.source.beginpage237
dc.source.endpage244
dc.source.conference236th ECS Fall Meeting16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)
dc.source.conferencedate13/10/2019
dc.source.conferencelocationAtlanta, GA USA
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 92; Issue 2


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