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Quantitative modelling of deposition of airborne molecular contamination

dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-27T13:54:39Z
dc.date.available2021-10-27T13:54:39Z
dc.date.issued2019-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33579
dc.sourceIIOimport
dc.titleQuantitative modelling of deposition of airborne molecular contamination
dc.typeMeeting abstract
dc.contributor.imecauthorMertens, Paul
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage2
dc.source.conferenceThe 236th ECS Fall Meeting 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)
dc.source.conferencedate13/10/2019
dc.source.conferencelocationAtlanta, GA USA
dc.identifier.urlhttp://ma.ecsdl.org/content/MA2019-02/23/1119.abstract
imec.availabilityPublished - imec


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