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Alignment-tolerant interfacing of a photonic integrated circuit using back side etched silicon microlenses

dc.contributor.authorMissinne, Jeroen
dc.contributor.authorTeigell Beneitez, Nuria
dc.contributor.authorMangal, Nivesh
dc.contributor.authorZhang, J.
dc.contributor.authorVasiliev, Anton
dc.contributor.authorVan Campenhout, Joris
dc.contributor.authorSnyder, Brad
dc.contributor.authorRoelkens, Gunther
dc.contributor.authorVan Steenberge, Geert
dc.date.accessioned2021-10-27T14:04:44Z
dc.date.available2021-10-27T14:04:44Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33597
dc.sourceIIOimport
dc.titleAlignment-tolerant interfacing of a photonic integrated circuit using back side etched silicon microlenses
dc.typeProceedings paper
dc.contributor.imecauthorMissinne, Jeroen
dc.contributor.imecauthorTeigell Beneitez, Nuria
dc.contributor.imecauthorMangal, Nivesh
dc.contributor.imecauthorVasiliev, Anton
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.imecauthorRoelkens, Gunther
dc.contributor.imecauthorVan Steenberge, Geert
dc.contributor.orcidimecMissinne, Jeroen::0000-0002-3470-620X
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.contributor.orcidimecRoelkens, Gunther::0000-0002-4667-5092
dc.contributor.orcidimecVan Steenberge, Geert::0000-0001-8574-1235
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1092304
dc.source.conferenceSilicon Photonics XIV
dc.source.conferencedate2/02/2019
dc.source.conferencelocationSan Francisco, CA USA
dc.identifier.urlhttps://doi.org/10.1117/12.2506159
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 10923


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