Show simple item record

Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging

dc.contributor.authorMochi, Iacopo
dc.contributor.authorTimmermans, Marina
dc.contributor.authorGallagher, Emily
dc.contributor.authorMariano, Marina
dc.contributor.authorPollentier, Ivan
dc.contributor.authorRajendran, Rajeev
dc.contributor.authorHelfenstein, Patrick
dc.contributor.authorFernandez, Sara
dc.contributor.authorKazazis, Dimitrios
dc.contributor.authorEkinci, Yasin
dc.date.accessioned2021-10-27T14:05:21Z
dc.date.available2021-10-27T14:05:21Z
dc.date.issued2019
dc.identifier.issn1932-5150
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33598
dc.sourceIIOimport
dc.titleExperimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging
dc.typeJournal article
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorGallagher, Emily
dc.contributor.imecauthorMariano, Marina
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage14002
dc.source.journalJournal of Micro/Nanolithography MEMS and MOEMS
dc.source.issue1
dc.source.volume18
dc.identifier.urlhttps://doi.org/10.1117/1.JMM.18.1.014002
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
44421.pdf
Size:
4.204Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record