Linear arrays of uncooled poly SiGe microbolometers for IR detection

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Authors
De Moor, Piet; Sedky, Sherif; Sabuncuoglu Tezcan, Deniz; Van Hoof, Chris
Conference
Micromachined Devices and Components V
Title
Linear arrays of uncooled poly SiGe microbolometers for IR detection
Publication type
Proceedings paper
Embargo date
9999-12-31
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