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Uncooled IR bolometers using surface micromachined Poly SiGe

dc.contributor.authorDe Moor, Piet
dc.contributor.authorSedky, Sherif
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-06T10:56:27Z
dc.date.available2021-10-06T10:56:27Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3365
dc.sourceIIOimport
dc.titleUncooled IR bolometers using surface micromachined Poly SiGe
dc.typeProceedings paper
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage43
dc.source.endpage46
dc.source.conferenceProceedings 2nd International Conference on Integrated Micro/Nano Technology for Space Applications - MNT
dc.source.conferencedate11/04/1999
dc.source.conferencelocationPasadena, CA USA
imec.availabilityPublished - open access
imec.internalnotesVol.1


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