Fabrication and reliability testing of Ti/TiN heaters

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Authors
De Moor, Piet; Witvrouw, Ann; Simons, Veerle; De Wolf, Ingrid
Conference
Micromachining and Microfabrication Process Technology V
Title
Fabrication and reliability testing of Ti/TiN heaters
Publication type
Proceedings paper
Embargo date
9999-12-31
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