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Compositional and strain metrology in nanoscale structures using Raman spectroscopy

dc.contributor.authorNuytten, Thomas
dc.date.accessioned2021-10-27T14:56:18Z
dc.date.available2021-10-27T14:56:18Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33685
dc.sourceIIOimport
dc.titleCompositional and strain metrology in nanoscale structures using Raman spectroscopy
dc.typeOral presentation
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.source.peerreviewno
dc.source.conference3DAM Workshop 2019
dc.source.conferencedate15/03/2019
dc.source.conferencelocationGrenoble France
imec.availabilityPublished - imec


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