dc.contributor.author | Ohashi, Takeyoshi | |
dc.contributor.author | Hasumi, Kazuhisa | |
dc.contributor.author | Masami, Ikota | |
dc.contributor.author | Lorusso, Gian | |
dc.contributor.author | Mertens, Hans | |
dc.contributor.author | Witters, Liesbeth | |
dc.contributor.author | Horiguchi, Naoto | |
dc.date.accessioned | 2021-10-27T14:59:54Z | |
dc.date.available | 2021-10-27T14:59:54Z | |
dc.date.issued | 2019 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/33691 | |
dc.source | IIOimport | |
dc.title | SEM Inspection of Nanowire Devices: Contact inspection, Resistance and Capacitance Measurement and Buckling Evaluation | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Lorusso, Gian | |
dc.contributor.imecauthor | Mertens, Hans | |
dc.contributor.imecauthor | Witters, Liesbeth | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.source.peerreview | no | |
dc.source.conference | MNE 2019 | |
dc.source.conferencedate | 23/09/2019 | |
dc.source.conferencelocation | Rhodes Island Greece | |
imec.availability | Published - imec | |