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SEM Inspection of Nanowire Devices: Contact inspection, Resistance and Capacitance Measurement and Buckling Evaluation

dc.contributor.authorOhashi, Takeyoshi
dc.contributor.authorHasumi, Kazuhisa
dc.contributor.authorMasami, Ikota
dc.contributor.authorLorusso, Gian
dc.contributor.authorMertens, Hans
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-27T14:59:54Z
dc.date.available2021-10-27T14:59:54Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33691
dc.sourceIIOimport
dc.titleSEM Inspection of Nanowire Devices: Contact inspection, Resistance and Capacitance Measurement and Buckling Evaluation
dc.typeOral presentation
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.source.peerreviewno
dc.source.conferenceMNE 2019
dc.source.conferencedate23/09/2019
dc.source.conferencelocationRhodes Island Greece
imec.availabilityPublished - imec


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