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Mechanical behavior of porous thin low-k films during nanoindentation

dc.contributor.authorOkudur, Oguzhan Orkut
dc.contributor.authorVanstreels, Kris
dc.contributor.authorSaleh, Ahmed Sobhi
dc.contributor.authorHangen, Ude
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-27T15:00:31Z
dc.date.available2021-10-27T15:00:31Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33692
dc.sourceIIOimport
dc.titleMechanical behavior of porous thin low-k films during nanoindentation
dc.typeMeeting abstract
dc.contributor.imecauthorOkudur, Oguzhan Orkut
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecOkudur, Oguzhan Orkut::0000-0002-4790-7772
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.conferenceNanobruecken 2019
dc.source.conferencedate19/02/2019
dc.source.conferencelocationBerlin Germany
imec.availabilityPublished - imec


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