Show simple item record

Cleaning challenges associated with scaling boosters and performance enhancement for advanced logic devices

dc.contributor.authorOniki, Yusuke
dc.date.accessioned2021-10-27T15:02:10Z
dc.date.available2021-10-27T15:02:10Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33695
dc.sourceIIOimport
dc.titleCleaning challenges associated with scaling boosters and performance enhancement for advanced logic devices
dc.typeProceedings paper
dc.contributor.imecauthorOniki, Yusuke
dc.contributor.orcidimecOniki, Yusuke::0000-0002-6619-1327
dc.source.peerreviewno
dc.source.conferenceSurface Preparation and Cleaning Conference (SPCC)
dc.source.conferencedate2/04/2019
dc.source.conferencelocationPortland, OR US
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record