Selective etches for gate-all-around (GAA) device integration: opportunities and challenges

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Authors
Oniki, Yusuke; Altamirano Sanchez, Efrain; Holsteyns, Frank
Conference
16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)
Title
Selective etches for gate-all-around (GAA) device integration: opportunities and challenges
Publication type
Meeting abstract
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