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Optimizing a thermal based sensor setup for monitoring physical changes of thin films over time using numerivcal modeling

dc.contributor.authorOudebrouckx, Gilles
dc.contributor.authorVandenryt, Thijs
dc.contributor.authorWagner, Patrick
dc.contributor.authorThoelen, Ronald
dc.date.accessioned2021-10-27T15:13:34Z
dc.date.available2021-10-27T15:13:34Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33714
dc.sourceIIOimport
dc.titleOptimizing a thermal based sensor setup for monitoring physical changes of thin films over time using numerivcal modeling
dc.typeMeeting abstract
dc.contributor.imecauthorOudebrouckx, Gilles
dc.contributor.imecauthorThoelen, Ronald
dc.contributor.orcidimecThoelen, Ronald::0000-0001-6845-0866
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage2
dc.source.conferenceBelgian Pphysical Society Conference 2019
dc.source.conferencedate22/05/2019
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - open access


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