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Novel temporary bonding and debonding solutions enabling an ultrahigh interconnect density FO-WLP structure assembly with quasi-zero die shift
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Authors
Podpod, Arnita
;
Phommahaxay, Alain
;
Bex, Pieter
;
Kennes, Koen
;
Bertheau, Julien
;
Arumugam, Hariharan
;
Cochet, Tom
;
Rebibis, Kenneth June
;
Sleeckx, Erik
;
Miller, Andy
;
Beyer, Gerald
;
Beyne, Eric
Conference
2019 International Wafer Level Packaging Conference (IWLPC)
Title
Novel temporary bonding and debonding solutions enabling an ultrahigh interconnect density FO-WLP structure assembly with quasi-zero die shift
Publication type
Proceedings paper
Embargo date
9999-12-31
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