Publication:
Selective epitaxial p-SiGe source-drain contacts: low contact resistivity (1.5x10-9 ohm.cm2) by optimizing strain and doping concentration
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1964 since deposited on 2021-10-27
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Acq. date: 2026-04-28
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Statistics
Views
1964 since deposited on 2021-10-27
1last month
1last week
Acq. date: 2026-04-28
Citations