Publication:
Selective epitaxial p-SiGe source-drain contacts: low contact resistivity (1.5x10-9 ohm.cm2) by optimizing strain and doping concentration
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1963 since deposited on 2021-10-27
2last month
Acq. date: 2025-12-15
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Metrics
Views
1963 since deposited on 2021-10-27
2last month
Acq. date: 2025-12-15
Citations