Authors

Porret, Clément; Huang, Yan-Hua; Rengo, Gianluca; Yu, Hao; Schaekers, Marc; Everaert, Jean-Luc; Heyns, Marc; Vohra, Anurag; Hikavyy, Andriy; Rosseel, Erik; Langer, Robert; Loo, Roger

Conference

Extended Abstracts of the 2019 International Conference on Solid State Devices and Materials - SSDM

Title

Selective epitaxial p-SiGe source-drain contacts: low contact resistivity (1.5x10-9 ohm.cm2) by optimizing strain and doping concentration

Publication type

Proceedings paper