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Plasma - Assisted ALD of Lipo(N) for Solid State Batteries
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Authors
Put, Brecht
;
Mees, Maarten
;
Hornsveld, Norah
;
Hollevoet, Simon
;
Sepulveda Marquez, Alfonso
;
Vereecken, Philippe
;
Kessels, Erwin
;
Creatore, Adriana
ISSN
0013-4651
Issue
6
Journal
Journal of the Electrochemical Society
Volume
166
Title
Plasma - Assisted ALD of Lipo(N) for Solid State Batteries
Publication type
Journal article
Embargo date
9999-12-31
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