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Plasma - Assisted ALD of Lipo(N) for Solid State Batteries

dc.contributor.authorPut, Brecht
dc.contributor.authorMees, Maarten
dc.contributor.authorHornsveld, Norah
dc.contributor.authorHollevoet, Simon
dc.contributor.authorSepulveda Marquez, Alfonso
dc.contributor.authorVereecken, Philippe
dc.contributor.authorKessels, Erwin
dc.contributor.authorCreatore, Adriana
dc.date.accessioned2021-10-27T16:28:15Z
dc.date.available2021-10-27T16:28:15Z
dc.date.issued2019
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33835
dc.sourceIIOimport
dc.titlePlasma - Assisted ALD of Lipo(N) for Solid State Batteries
dc.typeJournal article
dc.contributor.imecauthorPut, Brecht
dc.contributor.imecauthorMees, Maarten
dc.contributor.imecauthorHollevoet, Simon
dc.contributor.imecauthorSepulveda Marquez, Alfonso
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecMees, Maarten::0000-0001-7217-5510
dc.contributor.orcidimecSepulveda Marquez, Alfonso::0000-0003-4726-177X
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageA1239
dc.source.endpageA1242
dc.source.journalJournal of the Electrochemical Society
dc.source.issue6
dc.source.volume166
dc.identifier.urlhttp://jes.ecsdl.org/content/166/6/A1239.full
imec.availabilityPublished - open access


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