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On-chip surface enhanced raman spectroscopy using ALD grown plasmonic nanotrenches integrated with a silicon nitride slot waveguide

dc.contributor.authorRaza, Ali
dc.contributor.authorClemmen, Stephane
dc.contributor.authorVan Daele, Michiel
dc.contributor.authorDendooven, Jolien
dc.contributor.authorGriffiths, Matthew B.E
dc.contributor.authorBarry, Sean T.
dc.contributor.authorSkirtach, Andre
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-27T16:55:57Z
dc.date.available2021-10-27T16:55:57Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33878
dc.sourceIIOimport
dc.titleOn-chip surface enhanced raman spectroscopy using ALD grown plasmonic nanotrenches integrated with a silicon nitride slot waveguide
dc.typeProceedings paper
dc.contributor.imecauthorRaza, Ali
dc.contributor.imecauthorClemmen, Stephane
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecClemmen, Stephane::0000-0003-0192-4662
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageT.B1.3
dc.source.conference21st European Conference on Integratred Optics (ECIO 2019)
dc.source.conferencedate24/04/2019
dc.source.conferencelocationGhent Belgium
imec.availabilityPublished - open access


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