Show simple item record

Area selective grafting of siloxane molecules on low-k dielectric with resepct to copper surface

dc.contributor.authorRezvanov, Askar
dc.contributor.authorGornev, E.S.
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorArmini, Silvia
dc.date.accessioned2021-10-27T17:03:45Z
dc.date.available2021-10-27T17:03:45Z
dc.date.issued2019
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33889
dc.sourceIIOimport
dc.titleArea selective grafting of siloxane molecules on low-k dielectric with resepct to copper surface
dc.typeJournal article
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewyes
dc.source.beginpage317
dc.source.endpage324
dc.source.journalApplied Surface Science
dc.source.volume476
dc.identifier.urlhttps://www.sciencedirect.com/science/article/pii/S0169433219300972
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record