Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Articles
View item
imec Publications Repository
imec Publications
Articles
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Area selective grafting of siloxane molecules on low-k dielectric with resepct to copper surface
Metadata
Show full item record
Authors
Rezvanov, Askar
;
Gornev, E.S.
;
de Marneffe, Jean-Francois
;
Armini, Silvia
ISSN
0169-4332
Journal
Applied Surface Science
Volume
476
Title
Area selective grafting of siloxane molecules on low-k dielectric with resepct to copper surface
Publication type
Journal article
Collections
Articles
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login