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Area selective grafting of siloxane molecules on low-k dielectric with resepct to copper surface
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Area selective grafting of siloxane molecules on low-k dielectric with resepct to copper surface
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Date
2019
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rezvanov, Askar
;
Gornev, E.S.
;
de Marneffe, Jean-Francois
;
Armini, Silvia
Journal
Applied Surface Science
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1976
since deposited on 2021-10-27
Acq. date: 2025-12-11
Citations
Metrics
Views
1976
since deposited on 2021-10-27
Acq. date: 2025-12-11
Citations