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High resolution stress and temperature measurements in semiconductor devices using micro-Raman spectroscopy

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorChen, Jian
dc.contributor.authorRasras, Mahmoud
dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorSimons, Veerle
dc.date.accessioned2021-10-06T10:59:41Z
dc.date.available2021-10-06T10:59:41Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3388
dc.sourceIIOimport
dc.titleHigh resolution stress and temperature measurements in semiconductor devices using micro-Raman spectroscopy
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorSimons, Veerle
dc.contributor.orcidimecSimons, Veerle::0000-0001-5714-955X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage239
dc.source.endpage252
dc.source.conferenceAdvanced Photonic Sensors and Applications
dc.source.conferencedate30/11/1999
dc.source.conferencelocationSingapore
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 3897


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