Authors

Rochus, Veronique; Westerveld, Wouter; Figeys, Bruno; Rottenberg, Xavier; Jansen, Roelof

Conference

20th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems

Title

Simulation and design of an optical accelerometer

Publication type

Proceedings paper

Embargo date

9999-12-31