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Analysis of local mechanical stresses in and near tungsten lines on silicon substrates

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorIgnat, M.
dc.contributor.authorPozza, G.
dc.contributor.authorManiguet, L.
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-10-06T10:59:50Z
dc.date.available2021-10-06T10:59:50Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3389
dc.sourceIIOimport
dc.titleAnalysis of local mechanical stresses in and near tungsten lines on silicon substrates
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.source.peerreviewno
dc.source.beginpage6477
dc.source.endpage6485
dc.source.journalJ. Appl. Phys.
dc.source.issue9
dc.source.volume85
imec.availabilityPublished - imec


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