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Two-dimensional profiling using scanning spreading resistance microscopy

dc.contributor.authorDe Wolf, Peter
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorClarysse, Trudo
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorStephenson, Robert
dc.date.accessioned2021-10-06T11:00:21Z
dc.date.available2021-10-06T11:00:21Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3392
dc.sourceIIOimport
dc.titleTwo-dimensional profiling using scanning spreading resistance microscopy
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.conferenceCentennial Meeting of the American Physical Society; March 1999; Atlanta, Ga, USA.
imec.availabilityPublished - imec


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