dc.contributor.author | De Wolf, Peter | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Smith, H. | |
dc.contributor.author | Khalil, N. | |
dc.date.accessioned | 2021-10-06T11:00:29Z | |
dc.date.available | 2021-10-06T11:00:29Z | |
dc.date.issued | 1999 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3393 | |
dc.source | IIOimport | |
dc.title | Intercomparison of 2-D carrier profiles in MOSFET structures obtaind with scanning resistance microscopy and inverse modeling | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 148 | |
dc.source.endpage | 154 | |
dc.source.conference | 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors | |
dc.source.conferencedate | 28/03/1999 | |
dc.source.conferencelocation | Research Triangle Park, NC USA | |
imec.availability | Published - open access | |