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Atom probe tomography on contemporary semiconductor devices: Challenges in data acquisition, quantification and spatial accuracy

dc.contributor.authorScheerder, Jeroen
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorDialameh, Masoud
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorMorris, Richard
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorvan der Heide, Paul
dc.date.accessioned2021-10-27T17:41:22Z
dc.date.available2021-10-27T17:41:22Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33948
dc.sourceIIOimport
dc.titleAtom probe tomography on contemporary semiconductor devices: Challenges in data acquisition, quantification and spatial accuracy
dc.typeOral presentation
dc.contributor.imecauthorScheerder, Jeroen
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorDialameh, Masoud
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.orcidimecScheerder, Jeroen::0000-0002-9301-0392
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecDialameh, Masoud::0000-0002-1439-590X
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.source.peerreviewno
dc.source.conferenceEuropean Atom Probe Workshop 2019
dc.source.conferencedate12/11/2019
dc.source.conferencelocationRouen France
imec.availabilityPublished - imec


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