dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Zhang, Weihang | |
dc.contributor.author | Zhang, Jiahan | |
dc.contributor.author | Claeys, Cor | |
dc.contributor.author | Zhao, Ming | |
dc.date.accessioned | 2021-10-27T18:23:43Z | |
dc.date.available | 2021-10-27T18:23:43Z | |
dc.date.issued | 2019 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/34011 | |
dc.source | IIOimport | |
dc.title | Defect Assessment in AlN Nucleation Layers Grown on Silicon and Silicon-on-Insulator Substrates | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.imecauthor | Zhao, Ming | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.contributor.orcidimec | Zhao, Ming::0000-0002-0856-851X | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1 | |
dc.source.endpage | 4 | |
dc.source.conference | China Semiconductor Technology International Conference CSTIC 2019 | |
dc.source.conferencedate | 20/03/2019 | |
dc.source.conferencelocation | Shanaghai China | |
dc.identifier.url | https://ieeexplore.ieee.org/document/8755720 | |
imec.availability | Published - open access | |