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Defect Assessment in AlN Nucleation Layers Grown on Silicon and Silicon-on-Insulator Substrates

dc.contributor.authorSimoen, Eddy
dc.contributor.authorZhang, Weihang
dc.contributor.authorZhang, Jiahan
dc.contributor.authorClaeys, Cor
dc.contributor.authorZhao, Ming
dc.date.accessioned2021-10-27T18:23:43Z
dc.date.available2021-10-27T18:23:43Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34011
dc.sourceIIOimport
dc.titleDefect Assessment in AlN Nucleation Layers Grown on Silicon and Silicon-on-Insulator Substrates
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorZhao, Ming
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecZhao, Ming::0000-0002-0856-851X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage4
dc.source.conferenceChina Semiconductor Technology International Conference CSTIC 2019
dc.source.conferencedate20/03/2019
dc.source.conferencelocationShanaghai China
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8755720
imec.availabilityPublished - open access


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