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Qualitative determination of the altered layer as a function of ion fluence: buildup, thickness and composition

dc.contributor.authorDeleu, Jeroen
dc.contributor.authorBrijs, Bert
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-06T11:01:50Z
dc.date.available2021-10-06T11:01:50Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3402
dc.sourceIIOimport
dc.titleQualitative determination of the altered layer as a function of ion fluence: buildup, thickness and composition
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceSIMS XII; 5-10 September 1999; Brussel, Belgium.
imec.availabilityPublished - imec


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