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Surface diffusion for defect mitigation during area-selective deposition of Ru

dc.contributor.authorSoethoudt, Job
dc.contributor.authorGrillo, Fabio
dc.contributor.authorMarques, Esteban
dc.contributor.authorVan Ommen, Ruud
dc.contributor.authorHody, Hubert
dc.contributor.authorDelabie, Annelies
dc.date.accessioned2021-10-27T18:44:02Z
dc.date.available2021-10-27T18:44:02Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34041
dc.sourceIIOimport
dc.titleSurface diffusion for defect mitigation during area-selective deposition of Ru
dc.typeMeeting abstract
dc.contributor.imecauthorSoethoudt, Job
dc.contributor.imecauthorMarques, Esteban
dc.contributor.imecauthorHody, Hubert
dc.contributor.imecauthorDelabie, Annelies
dc.source.peerreviewno
dc.source.conferenceASD 2019
dc.source.conferencedate4/04/2019
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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