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Linewidth and roughness measurement of SAOP by using FIB and planer-TEM as reference metrology

dc.contributor.authorTakamasu, Kiyoshi
dc.contributor.authorTakahashi, Satoru
dc.contributor.authorKawada, Hiroki
dc.contributor.authorIkota, Masami
dc.contributor.authorDecoster, Stefan
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorLorusso, Gian
dc.date.accessioned2021-10-27T19:22:58Z
dc.date.available2021-10-27T19:22:58Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34099
dc.sourceIIOimport
dc.titleLinewidth and roughness measurement of SAOP by using FIB and planer-TEM as reference metrology
dc.typeProceedings paper
dc.contributor.imecauthorDecoster, Stefan
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorLorusso, Gian
dc.contributor.orcidimecDecoster, Stefan::0000-0003-1162-9288
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage109590Q
dc.source.conferenceMetrology, Inspection, and Process Control for Microlithography XXXIII
dc.source.conferencedate24/02/2019
dc.source.conferencelocationSan Jose, CA California
dc.identifier.urlhttps://doi.org/10.1117/12.2515989
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 10959


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