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Evaluation of room temperature wafer bonding by fabrication of a GaAs/Pt/Si metal base transistor
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Authors
Dessein, Kristof
;
Nemeth, Stefan
;
Vlutters, R.
;
Delaey, L.
;
De Boeck, Jo
;
Borghs, Gustaaf
Conference
ESSDERC'99 - Proceedings of the 29th European Solid-State Device Research Conference
Title
Evaluation of room temperature wafer bonding by fabrication of a GaAs/Pt/Si metal base transistor
Publication type
Proceedings paper
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