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The influence of Ti capping layers on CoSi2 formation

dc.contributor.authorDetavernier, C.
dc.contributor.authorDonaton, R.
dc.contributor.authorMaex, Karen
dc.contributor.authorVan Meirhaeghe, R.
dc.contributor.authorCardon, F.
dc.date.accessioned2021-10-06T11:03:52Z
dc.date.available2021-10-06T11:03:52Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3415
dc.sourceIIOimport
dc.titleThe influence of Ti capping layers on CoSi2 formation
dc.typeOral presentation
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceEuropean Workshop Materials for Advanced Metallization; March 8-10, 1999; Oostende, Belgium.
imec.availabilityPublished - imec


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