Plasma-enhanced atomic layer deposition of nanostructured gold near room temperature

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Author(s)

Van Daele, Michiel

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Griffiths, Matthew B.E.

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Minjauw, Matthias M.

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Solano, Eduardo

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Ramachandran, Ranjith K.

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Clemmen, Stephane

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Detavenier, Christophe

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Dendooven, Jolien

Journal

ACS Applied Materials & Interfaces

Metrics

1959 since deposited on 2021-10-27

Acq. date: 2025-10-23