Plasma-enhanced atomic layer deposition of nanostructured gold near room temperature

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Authors

Van Daele, Michiel; Griffiths, Matthew B.E.; Raza, Ali; Minjauw, Matthias M.; Solano, Eduardo; Feng, Ji-Yu; Ramachandran, Ranjith K.; Clemmen, Stephane; Baets, Roel; Barry, Sean Y.; Detavenier, Christophe; Dendooven, Jolien

ISSN

1944-8244

Issue

40

Journal

ACS Applied Materials & Interfaces

Volume

11

Title

Plasma-enhanced atomic layer deposition of nanostructured gold near room temperature

Publication type

Journal article

Embargo date

9999-12-31

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