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Plasma-enhanced atomic layer deposition of nanostructured gold near room temperature

dc.contributor.authorVan Daele, Michiel
dc.contributor.authorGriffiths, Matthew B.E.
dc.contributor.authorRaza, Ali
dc.contributor.authorMinjauw, Matthias M.
dc.contributor.authorSolano, Eduardo
dc.contributor.authorFeng, Ji-Yu
dc.contributor.authorRamachandran, Ranjith K.
dc.contributor.authorClemmen, Stephane
dc.contributor.authorBaets, Roel
dc.contributor.authorBarry, Sean Y.
dc.contributor.authorDetavenier, Christophe
dc.contributor.authorDendooven, Jolien
dc.date.accessioned2021-10-27T20:20:48Z
dc.date.available2021-10-27T20:20:48Z
dc.date.issued2019-09
dc.identifier.issn1944-8244
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34182
dc.sourceIIOimport
dc.titlePlasma-enhanced atomic layer deposition of nanostructured gold near room temperature
dc.typeJournal article
dc.contributor.imecauthorRaza, Ali
dc.contributor.imecauthorClemmen, Stephane
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecClemmen, Stephane::0000-0003-0192-4662
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage37229
dc.source.endpage37238
dc.source.journalACS Applied Materials & Interfaces
dc.source.issue40
dc.source.volume11
dc.identifier.urlhttps://doi.org/10.1021/acsami.9b10848
imec.availabilityPublished - imec


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