dc.contributor.author | Van Daele, Michiel | |
dc.contributor.author | Griffiths, Matthew B.E. | |
dc.contributor.author | Raza, Ali | |
dc.contributor.author | Minjauw, Matthias M. | |
dc.contributor.author | Solano, Eduardo | |
dc.contributor.author | Feng, Ji-Yu | |
dc.contributor.author | Ramachandran, Ranjith K. | |
dc.contributor.author | Clemmen, Stephane | |
dc.contributor.author | Baets, Roel | |
dc.contributor.author | Barry, Sean Y. | |
dc.contributor.author | Detavenier, Christophe | |
dc.contributor.author | Dendooven, Jolien | |
dc.date.accessioned | 2021-10-27T20:20:48Z | |
dc.date.available | 2021-10-27T20:20:48Z | |
dc.date.issued | 2019-09 | |
dc.identifier.issn | 1944-8244 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/34182 | |
dc.source | IIOimport | |
dc.title | Plasma-enhanced atomic layer deposition of nanostructured gold near room temperature | |
dc.type | Journal article | |
dc.contributor.imecauthor | Raza, Ali | |
dc.contributor.imecauthor | Clemmen, Stephane | |
dc.contributor.imecauthor | Baets, Roel | |
dc.contributor.orcidimec | Clemmen, Stephane::0000-0003-0192-4662 | |
dc.contributor.orcidimec | Baets, Roel::0000-0003-1266-1319 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 37229 | |
dc.source.endpage | 37238 | |
dc.source.journal | ACS Applied Materials & Interfaces | |
dc.source.issue | 40 | |
dc.source.volume | 11 | |
dc.identifier.url | https://doi.org/10.1021/acsami.9b10848 | |
imec.availability | Published - imec | |