Amorphous gadolinium aluminate as a dielectric and sulfur for indium phosphide passivation

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Authors

van Dorp, Dennis; Nyns, Laura; Cuypers, Daniel; Ivanov, Tsvetan; Brizzi, Simone; Tallarida, Massimo; Fleischmann, Claudia; Hönicke, Philipp; Müller, Matthias; Richard, Olivier; Schmeisser, Dieter; De Gendt, Stefan; Lin, Dennis; Adelmann, Christoph

ISSN

2637-6113

Issue

11

Journal

ACS Applied Electronic Materials

Volume

1

Title

Amorphous gadolinium aluminate as a dielectric and sulfur for indium phosphide passivation

Publication type

Journal article

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