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Amorphous gadolinium aluminate as a dielectric and sulfur for indium phosphide passivation

dc.contributor.authorvan Dorp, Dennis
dc.contributor.authorNyns, Laura
dc.contributor.authorCuypers, Daniel
dc.contributor.authorIvanov, Tsvetan
dc.contributor.authorBrizzi, Simone
dc.contributor.authorTallarida, Massimo
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorHönicke, Philipp
dc.contributor.authorMüller, Matthias
dc.contributor.authorRichard, Olivier
dc.contributor.authorSchmeisser, Dieter
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorLin, Dennis
dc.contributor.authorAdelmann, Christoph
dc.date.accessioned2021-10-27T20:41:46Z
dc.date.available2021-10-27T20:41:46Z
dc.date.issued2019
dc.identifier.issn2637-6113
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34212
dc.sourceIIOimport
dc.titleAmorphous gadolinium aluminate as a dielectric and sulfur for indium phosphide passivation
dc.typeJournal article
dc.contributor.imecauthorvan Dorp, Dennis
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorIvanov, Tsvetan
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.orcidimecvan Dorp, Dennis::0000-0002-1085-4232
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecIvanov, Tsvetan::0000-0003-3407-2742
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.source.peerreviewyes
dc.source.beginpage2190
dc.source.endpage2201
dc.source.journalACS Applied Electronic Materials
dc.source.issue11
dc.source.volume1
dc.identifier.urlhttps://pubs.acs.org/doi/full/10.1021/acsaelm.9b00388
imec.availabilityPublished - imec


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