Show simple item record

Investigation of stress in STI using UV-Raman spectroscopy

dc.contributor.authorDombrowski, Kai
dc.contributor.authorDietrich, B.
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorRooyackers, Rita
dc.contributor.authorBadenes, Gonçal
dc.date.accessioned2021-10-06T11:05:37Z
dc.date.available2021-10-06T11:05:37Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3426
dc.sourceIIOimport
dc.titleInvestigation of stress in STI using UV-Raman spectroscopy
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.source.peerreviewno
dc.source.beginpage196
dc.source.endpage199
dc.source.conferenceESSDERC'99 - Proceedings of the 29th European Solid-State Device Research Conference; 13-15 September 1999; Leuven, Belgium.
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record