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Nanoscale simulation of self heating and thermal crosstalk in 3D finFET architectures

dc.contributor.authorVermeersch, Bjorn
dc.contributor.authorBury, Erik
dc.contributor.authorCroes, Kristof
dc.contributor.authorOprins, Herman
dc.contributor.authorKamrani, Hamed
dc.contributor.authorPourtois, Geoffrey
dc.date.accessioned2021-10-27T22:37:21Z
dc.date.available2021-10-27T22:37:21Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34371
dc.sourceIIOimport
dc.titleNanoscale simulation of self heating and thermal crosstalk in 3D finFET architectures
dc.typeMeeting abstract
dc.contributor.imecauthorVermeersch, Bjorn
dc.contributor.imecauthorBury, Erik
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorOprins, Herman
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.orcidimecVermeersch, Bjorn::0000-0001-8640-672X
dc.contributor.orcidimecBury, Erik::0000-0002-5847-3949
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.source.peerreviewno
dc.source.beginpageQN05.11.01
dc.source.conferenceMRS Spring Meeting
dc.source.conferencedate22/04/2019
dc.source.conferencelocationPhoenix, AZ USA
dc.identifier.urlhttps://mrsspring2019.zerista.com/event/member/560810
imec.availabilityPublished - imec


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