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Integrated photonic crystal cavity for terahertz waves on a free-standing silicon platform

dc.contributor.authorVerstuyft, Matti
dc.contributor.authorAkiki, Elias
dc.contributor.authorDucournau, Guillaume
dc.contributor.authorWalter, Benjamin
dc.contributor.authorFaucher, Marc
dc.contributor.authorMairiaux, Estelle
dc.contributor.authorLampin, Jean-François
dc.contributor.authorVanwolleghem, Mathias
dc.contributor.authorKuyken, Bart
dc.date.accessioned2021-10-27T22:47:07Z
dc.date.available2021-10-27T22:47:07Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34384
dc.sourceIIOimport
dc.titleIntegrated photonic crystal cavity for terahertz waves on a free-standing silicon platform
dc.typeProceedings paper
dc.contributor.imecauthorVerstuyft, Matti
dc.contributor.imecauthorKuyken, Bart
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conference8th International Workshop on Optical Terahertz Science and Technology (OTST 2019)
dc.source.conferencedate10/03/2019
dc.source.conferencelocationSanta Fe, NM USA
imec.availabilityPublished - open access


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