Authors

Wan, Danny; Swerts, Johan; Souriau, Laurent; Burnett, Jonathan; Piao, Xiaoyu; Mongillo, Massimo; Verjauw, Jeroen; Potocnik, Anton; Thiam, Arame; Jussot, Julien; Vangoidsenhoven, Diziana; Pacco, Antoine; Kudra, Marina; Niepce, David; Ivanov, Tsvetan; Boccardi, Guillaume; Mocuta, Dan; Bylander, Jonas; Radu, Iuliana

Conference

IEEE International Interconnect Technology Conference (IITC 2019) and Materials for Advanced Metallization Conference (MAM 2019)

Title

Fabrication of superconducting resonators in a 300 mm pilot line for quantum technologies

Publication type

Meeting abstract