Publication:

Fabrication of superconducting resonators in a 300 mm pilot line for quantum technologies

Date

2019

Meeting abstract

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Author(s)

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Souriau, Laurent

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Burnett, Jonathan

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Mongillo, Massimo

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Verjauw, Jeroen

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Potocnik, Anton

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Vangoidsenhoven, Diziana

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Ivanov, Tsvetan

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Boccardi, Guillaume

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Bylander, Jonas

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Statistics

2207 since deposited on 2021-10-27

Acq. date: 2026-02-27