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Modelling and extended characterization of sensitive optical micro-machined ultrasound sensors (OMUS) based on a silicon photonic ring resonator on an acoustical membrane

dc.contributor.authorWesterveld, Wouter
dc.contributor.authorLeinders, Suzanne
dc.contributor.authorNeer, Paul
dc.contributor.authorSnyder, Brad
dc.contributor.authorUrbach, Paul
dc.contributor.authorde Jong, Nico
dc.contributor.authorVerweij, Martin
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorRochus, Veronique
dc.date.accessioned2021-10-27T23:26:01Z
dc.date.available2021-10-27T23:26:01Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34435
dc.sourceIIOimport
dc.titleModelling and extended characterization of sensitive optical micro-machined ultrasound sensors (OMUS) based on a silicon photonic ring resonator on an acoustical membrane
dc.typeProceedings paper
dc.contributor.imecauthorWesterveld, Wouter
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorRochus, Veronique
dc.source.peerreviewyes
dc.source.conference23rd Annual Symposium of the IEEE Photonics Benelux Chapter
dc.source.conferencedate15/11/2018
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - imec


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