Authors

Westerveld, Wouter; Leinders, Suzanne; van Neer, Paul; Urbach, Paul; de Jong, Nico; Verweij, Martin; Rottenberg, Xavier; Rochus, Veronique

Conference

20th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems

Title

Optical micro-machined ultrasound sensors with a silicon photonic resonator in a buckled acoustical membrane

Publication type

Proceedings paper

Embargo date

9999-12-31