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Design, fabrication and testing of an opto-mechanical ultrasound sensor based on a sensitive silicon photonic waveguide

dc.contributor.authorWesterveld, Wouter
dc.contributor.authorMahmud Ul Hasan, Hasan MD
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorSeveri, Simone
dc.contributor.authorRochus, Veronique
dc.date.accessioned2021-10-27T23:28:55Z
dc.date.available2021-10-27T23:28:55Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34439
dc.sourceIIOimport
dc.titleDesign, fabrication and testing of an opto-mechanical ultrasound sensor based on a sensitive silicon photonic waveguide
dc.typeProceedings paper
dc.contributor.imecauthorWesterveld, Wouter
dc.contributor.imecauthorMahmud Ul Hasan, Hasan MD
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorRochus, Veronique
dc.source.peerreviewyes
dc.source.conference2019 IEEE International Ultrasonics Symposium (IEEE IUS 2019)
dc.source.conferencedate6/10/2019
dc.source.conferencelocationGlasgow UK
imec.availabilityPublished - imec


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