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Impact of Ge-oxide-scavenging on low-T steam oxidation and passivation of bi-axially strained Si0.75Ge0.25
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Authors
Wostyn, Kurt
;
Ragnarsson, Lars-Ake
;
Arimura, Hiroaki
;
Vaisman Chasin, Adrian
;
Conard, Thierry
;
Rondas, Dirk
;
Loo, Roger
;
Holsteyns, Frank
;
Horiguchi, Naoto
Conference
International Si Technology and Device Meeting / Int. Conf. on Si epitaxy and Heterostructures - 2nd Joint ISTDM / ICSI 2019 Con
Title
Impact of Ge-oxide-scavenging on low-T steam oxidation and passivation of bi-axially strained Si0.75Ge0.25
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