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Oxygen gettering cap to scavenge parasitic oxide interlayer in TiSi contacts

dc.contributor.authorYu, Hao
dc.contributor.authorSchaekers, Marc
dc.contributor.authorWang, Linlin
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorJiang, Yu-Long
dc.contributor.authorMocuta, Dan
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorCollaert, Nadine
dc.contributor.authorDe Meyer, Kristin
dc.date.accessioned2021-10-28T00:15:20Z
dc.date.available2021-10-28T00:15:20Z
dc.date.issued2019-11
dc.identifier.issn0741-3106
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34501
dc.sourceIIOimport
dc.titleOxygen gettering cap to scavenge parasitic oxide interlayer in TiSi contacts
dc.typeJournal article
dc.contributor.imecauthorYu, Hao
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecYu, Hao::0000-0002-1976-0259
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.embargo9999-12-31
dc.identifier.doi10.1109/LED.2019.2940819
dc.source.peerreviewyes
dc.source.beginpage1712
dc.source.endpage1715
dc.source.journalIEEE Electron Device Letters
dc.source.issue11
dc.source.volume40
imec.availabilityPublished - open access


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