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Oxygen gettering cap to scavenge parasitic oxide interlayer in TiSi contacts
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Authors
Yu, Hao
;
Schaekers, Marc
;
Wang, Linlin
;
Everaert, Jean-Luc
;
Jiang, Yu-Long
;
Mocuta, Dan
;
Horiguchi, Naoto
;
Collaert, Nadine
;
De Meyer, Kristin
DOI
10.1109/LED.2019.2940819
ISSN
0741-3106
Issue
11
Journal
IEEE Electron Device Letters
Volume
40
Title
Oxygen gettering cap to scavenge parasitic oxide interlayer in TiSi contacts
Publication type
Journal article
Embargo date
9999-12-31
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