Publication:

Oxygen gettering cap to scavenge parasitic oxide interlayer in TiSi contacts

Date

2019-11

Journal article

https://doi.org/10.1109/LED.2019.2940819

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Files

37994.pdf 2.16 MB

Author(s)

;

Schaekers, Marc

;

;

Everaert, Jean-Luc

;

;

;

Horiguchi, Naoto

;

Collaert, Nadine

;

De Meyer, Kristin

Journal

IEEE Electron Device Letters

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Acq. date: 2026-04-26